Semiconductor Process Equipment
Use Case
Software implementation enables the reduction of design effort by utilizing existing design assets
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System Configuration
Without changing the existing hardware, it is possible to implement a CC-Link IE TSN manager station in an industrial PC, which is the mainstream main controller for semiconductor equipment, using software. In addition, by adopting CC-Link IE TSN, it is possible to communicate large volumes of data for recipe and traceability at high speed without affecting control communication.
Key Points
- 1.Provides rapid communications to handle large amounts of recipe and traceability data
- 2.Enables mixing with Ethernet communications such as SECS, HSMS, GEM, etc. without affecting the deterministic performance of control communications
- 3.Ethernet devices communicate directly with the host on the upper layer
- 4.Use current design assets by implementing a software protocol stack on top of the main controller (manager Station) IPC